by Can Rao, Yarui Peng, Tongqing Wang, Sung Kyu Lim, and Xinchun Lu
Reference:
Can Rao, Yarui Peng, Tongqing Wang, Sung Kyu Lim, and Xinchun Lu, “Investigation of Post-Annealing Stress and Pop-Out in TSV Front-side CMP”, in Proc. International Conference on Planarization/CMP Technology, Oct 2016, Best Student Paper Award.
Bibtex Entry:
@string{conf.ieee.icpt="International Conference on Planarization/CMP Technology"}
@InProceedings{C.Rao-Conf.IEEE.ICPT-2016,

	author    = {Can Rao and Yarui Peng and Tongqing Wang and Sung Kyu Lim and Xinchun Lu},
	title     = {{Investigation of Post-Annealing Stress and Pop-Out in TSV Front-side CMP}},
	booktitle = Conf.IEEE.ICPT,
	year      = {2016},
	month     = oct,
	note      = {Best Student Paper Award},
}